| 000 | 00770nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2006##################000#0#eng## | ||
| 020 | _a9780824724313 | ||
| 022 | _a2005049275 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a620.5 JAC | ||
| 245 |
_aMicrofabrication and nanomanufacturing _cedited by Mark J. Jackson |
||
| 260 |
_aBoca Raton, FL ; New York _bCRC Taylor & Francis _c2006 |
||
| 300 | _a[xii], 401 p. : ill. ; 27 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aIntegrated circuits - Design and construction | ||
| 650 | _aMicroelectromechanical systems - Design and construction | ||
| 650 | _aMicroelectronics | ||
| 700 | _aJackson, Mark J | ||
| 990 | _aa89e14a0ac10000c3bfb64ea8a6600c8 | ||
| 991 | _a107845 | ||
| 999 |
_c10187 _d10187 |
||