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	1.		Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing Takeshi Hattori (ed.) by Hattori, Takeshi Publication details: Berlin Springer 1998 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HAT.
	2.		Vapor surface treatments edited by Alain Galerie by Galerie, Alain Publication details: Bellingham, Wash. ; Springfield, Va ISTE ; Wiley 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.735 GAL.
	3.		Handbook for critical cleaning editor-in-chief, Barbara Kanegsberg ; associate editor, Edward Kanegsberg by Kanegsberg, Barbara Kanegsberg, Edward Publication details: Boca Raton, FL CRC Press c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381046 KAN.

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