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	1.		Optical lithography : here is why Burn J. Lin by Lin, Burn Jeng Publication details: Bellingham, WA SPIE 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 LIN.
	2.		Plasma etching : fundamentals and applications M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.] by Sugawara, M Fujita, K Handa, S Stansfield, Barry L Publication details: Oxford Oxford University Press 1998 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 SUG.
	3.		Plasma processing of semiconductors edited by P.F. Williams by Williams, P. F NATO Advanced Study Institute on Plasma Processing of Semiconductors (1996 : Bonas, France), North Atlantic Treaty Organization. Scientific Affairs Division Publication details: Dordrecht ; Boston Kluwer Academic Publishers 1997 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 WIL.
	4.		Introduction to microlithography edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden by Bowden, M. J Thompson, L. F Willson, C. G Edition: 2nd ed Publication details: Washington, DC American Chemical Society 1994 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 THO.
	5.		Lithography for semiconductor manufacturing II : 30 may-1 June, 2001, Edinburgh, UK Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK) by Mack, Chris A Stevenson, Tom European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 670 MAC.
	6.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HIT.
	7.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HIT.
	8.		Advanced processes for 193-nm immersion lithography Yayi Wei, Robert L. Brainard by Wei, Yayi Brainard, Robert L Publication details: Bellingham, Wash SPIE 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 WEI.
	9.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: No items available.
	10.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: No items available.

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