Advanced microelectronic processing techniques : 28-30 November 2000, Singapore H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors, ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]

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Publication details: Bellingham, Wash SPIE c2000Description: xix, 212 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 HAR (Browse shelf(Opens below))	Available		276695

Errata p. tipped in. Includes bibliographical references and index

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