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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering by
Publication details: Bellingham, Wash SPIE c2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.382 WON.
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