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	1.		Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September, 1998, Santa Clara, California Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.] by Dang, Kim Toprac, Anthony J Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) Publication details: Bellingham, WA SPIE c1998 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3815 TOP.
	2.		Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] by Dang, Kim Toprac, Anthony J Electrochemical Society, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3815 top.
	3.		Introduction to microlithography edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden by Bowden, M. J Thompson, L. F Willson, C. G Edition: 2nd ed Publication details: Washington, DC American Chemical Society 1994 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 THO.
	4.		Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] by Graef, Mart Patel, Divyesh N Electrochemical Society, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.395 GRA.
	5.		No cover image available Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] by Graef, Mart Patel, Divyesh N Electrochemical Society, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c1999 Availability: No items available.
	6.		Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] by Graef, Mart Patel, Divyesh N Electrochemical Society, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c1999 Availability: No items available.
	7.		No cover image available Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] by Graef, Mart Patel, Divyesh N Electrochemical Society, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c1999 Availability: No items available.

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