Your search returned 23 results.

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	1.		MEMS : design and fabrication edited by Mohamed Gad-el-Hak by Gad-el-Hak, Mohamed Edition: 2nd ed Publication details: Boca Raton, FL ; New York CRC Taylor & Francis 2006 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381 GAD, ...
	2.		MEMS design, fabrication, characterization, and packaging : 30 may-1 June 2001, Edinburgh, UK Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK) by Behringer, Uwe F. W Uttamchandani, Deepak European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 BEH.
	3.		Microfabrication in tissue engineering and bioartificial organs Sangeeta Bhatia by Bhatia, Sangeeta Publication details: Dordrecht ; Boston Kluwer Academic Publishers c1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 660.6 BHA.
	4.		Micromachining and microfabrication : 28-30 November 2000, Singapore Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] by Chau, Kevin Parameswaran, Ash M Tay, Francis E. H Institute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2000 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 CHA.
	5.		Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China) by Tien, Norman C Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 TIE.
	6.		Micromachining and microfabrication process technology IX : 27-29 January 2004, San Jose, California, USA Mary Ann Maher, Jerome F. Jakubczak, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering by Jakubczak, Jerome Florian Perez-Maher, Mary Ann Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2004 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 MAH.
	7.		Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.] by Karam, Jean-Michel Smith, James H Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) Publication details: Bellingham, WA SPIE c1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 SMI.
	8.		Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.] by Karam, Jean-Michel Perez-Maher, Mary Ann Yasaitis, John Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 2003 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 YAS.
	9.		Micromachining and microfabrication process technology XI : 25 January, 2005, San Jose, California, USA Mary Ann Maher, Harold D. Stewart, Jung-Chih Chiao, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering by Chiao, Jung-Chih Perez-Maher, Mary Ann Stewart, Harold D Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2006 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 MAH.
	10.		Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA) by Chiao, Jung-Chih Perez-Maher, Mary Ann Resnick, Paul J Boston University. Photonics Center, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2008 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 MAH.
	11.		Micromachining and microfabrication process technology XIV : 27 January 2009, San Jose, California, United States Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; symposium cosponsors, Texas Instruments Inc. (United States) ... [et al.] by Chiao, Jung-Chih Maher, Mary-Ann Resnick, Paul J SPIE (Society), Texas Instruments Incorporated Publication details: Bellingham, WA SPIE c2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 MAH.
	12.		Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored and published by SPIE by Chiao, Jung-Chih Perez-Maher, Mary Ann Resnick, Paul J SPIE (Society) Publication details: Bellingham, WA SPIE c2010 Availability: Items available for loan: Anna Centenary Library (1)Call number: 671.35 MAH.
	13.		Microoptics and nanooptics fabrication edited by Shanalyn A. Kemme by Kemme, Shanalyn A Publication details: Boca Raton, FL CRC Press c2010 Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.4 KEM.
	14.		Microrobotics and microassembly II, 5-6 November 2000 Bradley J. Nelson, Jean-Marc Breguet, chairs/editors by Breguet, Jean-Marc Nelson, Bradley J Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash International Society for Optical Engineering c2000 Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.892 NEL.
	15.		Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania Armin Sulzmann by Armin, Sulzmann Publication details: Bellingham, WA SPIE 1997 Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.892 SUL.
	16.		Third international symposium on laser precision microfabrication : 27-31 May, 2002, Osaka, Japan Isamu Miyamoto ... [et al.] chairs/editors ; organized by JLPS--Japan Laser Processing Society ... [et al.] ; sponsored by the Commemorative Association for the Japan World Exposition (1970) ... [et al.] ; cooperating organizations, LIA--Laser Institute of America ... [et al.] by Miyamoto, Isamu Commemorative Association for the Japan World Exposition, 1970, International Symposium on Laser Precision Microfabrication (3rd : 2002 : Osaka, Japan), Japan Laser Processing Society, Laser Institute of America, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2003 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.366 MIY.
	17.		Transport in laser microfabrication : fundamentals and applications Costas P. Grigoropoulos by Grigoropoulos, Costas P Publication details: Cambridge Cambridge University Press 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.366 GRI.
	18.		Fabrication and design of resonant microdevices Behraad Bahreyni by Bahreyni, Behraad Publication details: Norwich, NY W. Andrew Inc c2008 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 BAH.
	19.		Fourth international symposium on laser precision microfabrication : 21-24 June, 2003, Munich, Germany Isamu Miyamoto ... [et al.] chairs/editors ; organized by JLPS--Japan Laser Processing Society ... [et al.] ; cooperating organizations JSPE--the Japan Society for Precision Engineering ... [et al.] by Miyamoto, Isamu International Symposium on Laser Precision Microfabrication (4th : 2003 : Munich, Germany), Japan Laser Processing Society, Seiki Gakkai (Japan) Publication details: Bellingham, WA SPIE 2003 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.366 MIY.
	20.		Instrumentation, metrology, and standards for nanomanufacturing III : 3-5 August 2009, San Diego, California, United States Michael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, NIST--National Institute of Standards and Technology (United States) by Allgair, John A Postek, Michael T National Institute of Standards and Technology (U.S.), SPIE (Society) Publication details: Bellingham, WA SPIE 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.5 POS.
	21.		Introduction to microfabrication Sami Franssila by Franssila, Sami Publication details: Hoboken, NJ J. Wiley c2004 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3 FRA.
	22.		Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, editor by Rai-Choudhury, P Publication details: Bellingham, WA Institution of Electrical Engineers, SPIE Optical Engineering Press c1997 Availability: Items available for loan: Anna Centenary Library (1)Call number: 670 RAI.2.
	23.		Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, editor by Rai-Choudhury, P Publication details: Bellingham, WA Institution of Electrical Engineers, SPIE Optical Engineering Press c1997 Availability: Items available for loan: Anna Centenary Library (1)Call number: 670 CHO.

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