MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

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Publication details: Bellingham, WA SPIE 2001Description: xxvii, 190 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 HEL (Browse shelf(Opens below))	Available		277489

Includes bibliographical references and index

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