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	1.		Mechanical design of microresonators : modeling and applications Nicolae Lobontiu by Lobontiu, Nicolae Publication details: New York McGraw-Hill 2006 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 LOB.
	2.		Mechanical microsensors M. Elwenspoek, R.J. Wiergerink by Elwenspoek, M Wiegerink, Remco J Publication details: Berlin Springer c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.2 ELW.
	3.		MEMS : design and fabrication edited by Mohamed Gad-el-Hak by Gad-el-Hak, Mohamed Edition: 2nd ed Publication details: Boca Raton, FL ; New York CRC Taylor & Francis 2006 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381 GAD, ...
	4.		MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.] by Helvajian, Henry Janson, Siegfried W Lärmer, Franz Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency Publication details: Bellingham, WA SPIE 2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 HEL.
	5.		MEMS design, fabrication, characterization, and packaging : 30 may-1 June 2001, Edinburgh, UK Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK) by Behringer, Uwe F. W Uttamchandani, Deepak European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 BEH.
	6.		Microfabrication and nanomanufacturing edited by Mark J. Jackson by Jackson, Mark J Publication details: Boca Raton, FL ; New York CRC Taylor & Francis 2006 Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.5 JAC.
	7.		CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications D. Lange, O. Brand, H. Baltes by Lange, D Baltes, H Brand, Oliver Publication details: Berlin Springer c2002 Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.413 LAN.
	8.		Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia Paul D. Frnazon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization IEEE South Australia Section by Franzon, Paul D Institute of Electrical and Electronics Engineers. South Australia Section, Society of Photo-optical Instrumentation Engineers, United States. Air Force Publication details: Bellingham, Wash SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 FRA.
	9.		Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore Bernard Courtois, Serge N. Demidenko, L.Y. Lau, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] by Courtois, B Demidenko, S. N Lau, Lee-Yee Institute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2000 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 COU.
	10.		Fabrication and design of resonant microdevices Behraad Bahreyni by Bahreyni, Behraad Publication details: Norwich, NY W. Andrew Inc c2008 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 BAH.
	11.		Fundamentals of microfabrication : the science of miniaturization Marc J. Madou by Madou, Marc J Edition: 2nd ed Publication details: Boca Raton, FL CRC Press 2002 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 MAD.
	12.		Indo-Russian workshop on micromechanical systems : 2-4 February 1999, New Delhi, India Alexander M. Prokhorov, V.S. Ramamurthy, chairs ; Vladimir I. Pustovoy, Vinoy K. Jain, editors ; organized by Solid State Physics Laboratory (India) ... [et al.] ; cosponsored by Defence Research and Development Organization (India) ... [et al.] by Jain, Vinoy K Prokhorov, A. M Pustovoy, Vladimir Defence Research & Development Organisation (India), Indo-Russian Workshop on Micromechanical Systems (1999 : New Delhi, India), Society of Photo-optical Instrumentation Engineers, Solid State Physics Laboratory (India) Publication details: Bellingham, WA SPIE c1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381045 PRO.
	13.		Introduction to microsystem technology : a guide for students Gerald Gerlach, Wolfram Dotzel ; translated by Dorte Muller by Gerlach, Gerald Dötzel, Wolfram Muller, Dorte Publication details: Chichester, England ; Hoboken, NJ J. Wiley & Sons c2008 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 GER.
	14.		No cover image available Micro electro mechanical system design James J. Allen by Allen, James J Publication details: Baca Raton, FL Taylor & Francis 2005 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 ALL.
	15.		No cover image available Micro electro mechanical system design James J. Allen by Allen, James J Edition: Special Indian edition Publication details: Baca Raton, FL Taylor & Francis 2005, 2015 First Indian Reprint Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 ALL.
	16.		No cover image available Micro electro mechanical system design James J. Allen by Allen, James J Publication details: Baca Raton, FL Taylor & Francis 2005 Availability: No items available.
	17.		No cover image available Micro electro mechanical system design James J. Allen by Allen, James J Edition: Special Indian edition Publication details: Baca Raton, FL Taylor & Francis 2005, 2015 First Indian Reprint Availability: No items available.

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