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1.
Materials & process integration for MEMS edited by Francis E.H. Tay by
Publication details: Dordrecht ; Boston Kluwer Academic Publishers c2002
Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.11299 TAY.

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Mechanical design of microresonators : modeling and applications Nicolae Lobontiu by
Publication details: New York McGraw-Hill 2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 LOB.

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Mechanical microsensors M. Elwenspoek, R.J. Wiergerink by
Publication details: Berlin Springer c2001
Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.2 ELW.

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Mechanics of microelectromechanical systems Nicolae Lobontiu, Ephrahim Garcia by
Publication details: Dordrecht ; Boston Kluwer Academic c2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 LOB.

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MEMS : a practical guide to design, analysis, and applications edited by Jan G. Korvink and Oliver Paul by
Publication details: Norwich, NY ; Heidelberg, Germany Springer, W. Andrew Pub c2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 KOR.

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MEMS : design and fabrication edited by Mohamed Gad-el-Hak by
Edition: 2nd ed
Publication details: Boca Raton, FL ; New York CRC Taylor & Francis 2006
Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381 GAD, ...

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MEMS : introduction and fundamentals edited by Mohamed Gad-El-Hak by
Edition: 2nd ed
Publication details: Boca Raton, FL ; New York CRC Taylor & Francis 2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GAD.

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MEMS adaptive optics IV 27-28 January 2010, San Francisco, California, United States Scot S.Olivier, Thomas G.Bifano,Joel A. Kubby by
Publication details: Bellingham, WA SPIE - Proceeding 2010
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 OLI.

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MEMS and microstructures in aerospace applications edited by Robert Osiander, M. Ann Garrison Darrin, John L. Champion by
Publication details: Baca Raton, FL Taylor & Francis c2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.135 OSI.

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MEMS and microsystems : design, manufacture, and nanoscale engineering Tai-Ran Hsu by
Edition: 2nd ed
Publication details: Hoboken, NJ John Wiley 2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 HSU.

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MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications A. R. Jha by
Publication details: Boca Raton, FL CRC Press c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.5 JHA.

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MEMS packaging Tai-Ran Hsu by
Publication details: London INSPEC, The institution of Electrical Engineers c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 HSU.

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MEMS/MOEMS packaging : concepts, designs, materials, and processes Ken Gilleo by
Publication details: New York McGraw-Hill 2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381046 GIL.

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Methodology for the modeling and simulation of microsystems by Bartlomiej F. Romanowicz by
Publication details: Dordrecht ; Boston Kluwer Academic Publishers 1998
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 ROM.

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Micro- and nanotechnology sensors, systems, and applications II 5-9 April 2010, Orlando, Florida, United States Thomas George,M.Saif Islam by
Publication details: Bellingham, WA SPIE 2010
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GEO.

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Micro mechanical systems : principles and technology edited by T. Fukuda and W. Menz by
Publication details: Amsterdam Elsevier 1998
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 FUK.

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Micro, nanosystems, and systems on chips : modeling, control, and estimation edited by Alina Voda by
Publication details: London ; Hoboken, NJ ISTE ; Wiley 2010
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 VOD.

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Microdrops and digital microfluidics Jean Berthier by
Publication details: Norwich, NY William Andrew Pub c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.8042 BER.

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Microelectromechanical systems Eve Versuh by
Publication details: New York Research Press c2015
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 VER.

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Microfabrication and nanomanufacturing edited by Mark J. Jackson by
Publication details: Boca Raton, FL ; New York CRC Taylor & Francis 2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.5 JAC.

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Micromachined ultrasound-based proximity sensors Mark R. Hornung, Oliver Brand by
Publication details: Boston Kluwer Academic 1999
Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.25 HOR.

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Micromechatronics Kenji Uchino, Jayne R. Giniewicz by
Publication details: New York Marcel Dekker c2003
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 UCH.

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Micromechatronics : modeling, analysis, and design with MATLAB Victor Giurgiutiu, Sergey Edward Lyshevski by
Edition: 2nd ed
Publication details: Boca Raton, FL CRC Press c2009
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 GIU.

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Micromixers : fundamentals, design and fabrication Nam-Trung Nguyen by
Publication details: Norwich, NY William Andrew c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 660.284292 NGU.

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Micro-optomechatronics Hiroshi Hosaka ... [et al.] by
Publication details: New York Marcel Dekker 2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.382 HOS.

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Microrobotics : methods and applications Yves Bellouard by
Publication details: Boca Raton, FL CRC Press 2015
Availability: Items available for loan: Anna Centenary Library (2)Call number: 629.892 BEL, ...

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Microrobotics and microassembly II, 5-6 November 2000 Bradley J. Nelson, Jean-Marc Breguet, chairs/editors by
Publication details: Bellingham, Wash International Society for Optical Engineering c2000
Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.892 NEL.

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Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania Armin Sulzmann by
Publication details: Bellingham, WA SPIE 1997
Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.892 SUL.

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Microsensors, MEMS, and smart devices Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim by
Publication details: Hoboken, NJ J. Wiley 2013
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GAR.

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Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany Christophe Gorecki, chair/editor ; sponsored by EOS--European Optical Society ... [et al.] by
Publication details: Bellingham, WA SPIE c1999
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GOR.

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Microsystems technology : fabrication, test & reliability edited by Jumana Boussey by
Publication details: London Kogan Page Science 2003
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 BOU.

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Modeling and control for micro/nano devices and systems edited by Ning Xi, Mingjun Zhang, Guangyong Li by
Publication details: Boca Raton, FL CRC Press c2014
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.4 XI.

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Modelling of microfabrication systems Raja Nassar and Weizhong Dai by
Edition: 1st ed
Publication details: Berlin Springer 2003
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 NAS.

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Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering Sergey Edward Lyshevski by
Edition: 2nd ed
Publication details: Boca Raton, FL CRC Press 2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 LYS.

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Nanotribology : critical assessment and research needs edited by Stephen M. Hsu and Z. Charles Ying by
Publication details: Dordrecht ; Boston Kluwer Academic Publishers c2003
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.89 HSU.

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Optical microscanners and microspectrometers using thermal bimorph actuators Gerhard Lammel, Sandra Schweizer, and Philippe Renaud by
Publication details: Dordrecht ; Boston Kluwer Academic c2002
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.367 LAM.

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Optimal synthesis methods for MEMS G. K. Ananthasuresh by
Publication details: Dordrecht ; Boston Kluwer Academic Publishers c2003
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 ANA.

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Optomechatronic micro/nano devices and components III 8-10 October 2007, Lausanne, Switzerland Lixin Dong by
Publication details: Bellingham, WA SPIE 2007
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.382 DON.

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Optomechatronic systems control III 8-10 October 2007, Lausanne, Switzerland Sergej Fatikow by
Publication details: Bellingham, WA SPIE
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381045 FAT.

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Photonic MEMS devices : design, fabrication and control Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.] by
Publication details: Boca Raton, FL CRC Press 2009
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 LIU.

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Polymers, phosphors, and voltaics for radioisotope microbatteries edited by Kenneth E. Bower ... [et al.] by
Publication details: Boca Raton, FL CRC Press 2002
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.31242 BOW.

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CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications D. Lange, O. Brand, H. Baltes by
Publication details: Berlin Springer c2002
Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.413 LAN.

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Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.] by
Publication details: Bellingham, Wash SPIE--the International Society for Optical Engineering c2000
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 PRO.

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Electromechanical systems, electric machines, and applied mechatronics Sergey E. Lyshevski by
Publication details: Boca Raton, Fl CRC Press 2000
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3 LYS.

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Fabrication and design of resonant microdevices Behraad Bahreyni by
Publication details: Norwich, NY W. Andrew Inc c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 BAH.

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Fundamentals of microfabrication : the science of miniaturization Marc J. Madou by
Edition: 2nd ed
Publication details: Boca Raton, FL CRC Press 2002
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 MAD.

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Introduction to microfabrication Sami Franssila by
Publication details: Hoboken, NJ J. Wiley c2004
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3 FRA.

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Introduction to microsystem technology : a guide for students Gerald Gerlach, Wolfram Dotzel ; translated by Dorte Muller by
Publication details: Chichester, England ; Hoboken, NJ J. Wiley & Sons c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621 GER.

127.
Introductory MEMS : fabrication and applications Thomas M. Adams, Richard A. Layton by
Publication details: Berlin ; New York Springer c2010
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38275 ADA.

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Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe by
Publication details: Amsterdam Elsevier 2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GIA.

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Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe by
Publication details: Amsterdam Elsevier 2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GIA.

130.
Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe by
Publication details: Amsterdam Elsevier 2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 GIA.

131.
Foundations of MEMS Chang Liu by
Publication details: Upper Saddle River, NJ Pearson Prentice Hall 2006
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3 LIU.

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Foundations of MEMS Chang Liu by
Edition: 2nd ed
Publication details: New Delhi Pearson 2016
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3 LIU.

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Introduction to microfluidics Patrick Tabeling ; translated by Suelin Chen by
Publication details: Oxford Oxford University Press 2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.8042 TAB.

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Introduction to microfluidics Patrick Tabeling ; translated by Suelin Chen by
Publication details: Oxford Oxford University Press 2010
Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.8042 TAB.

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Micro electro mechanical system design James J. Allen by
Publication details: Baca Raton, FL Taylor & Francis 2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 ALL.

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Micro electro mechanical system design James J. Allen by
Edition: Special Indian edition
Publication details: Baca Raton, FL Taylor & Francis 2005, 2015 First Indian Reprint
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 ALL.

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Precision engineering V. C. Venkatesh, Sudin Izman by
Publication details: New York McGraw-Hill c2008
Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.0045 VEN.

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Advanced MEMS packaging John H. Lau ... [et al.] by
Publication details: New York McGraw Hill c2010
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381046 LAU.

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Micro electro mechanical system design James J. Allen by
Publication details: Baca Raton, FL Taylor & Francis 2005
Availability: No items available.

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Micro electro mechanical system design James J. Allen by
Edition: Special Indian edition
Publication details: Baca Raton, FL Taylor & Francis 2005, 2015 First Indian Reprint
Availability: No items available.

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Precision engineering V. C. Venkatesh, Sudin Izman by
Publication details: New York McGraw-Hill c2008
Availability: No items available.

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