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Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA Daniel J. Herr, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH by
Publication details: Bellingham, WA SPIE c2003
Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 HER, ...
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Metrology, inspection, and process control for microlithography XXII : 25-28 February 2008, San Jose, California, USA John A. Allgair, Christopher J. Raymond, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) by
Publication details: Bellingham, WA SPIE 2008
Availability: Items available for loan: Anna Centenary Library (2)Call number: 539.752 ALL, ...
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Optical test and measurement technology and equipment : 4th international symposium on advanced Optical manufacturing and testing technologies : 19-21 November 2008, Chengdu, China Yudong Zhang... [et al. ], editors ; sponsored by COS--the Chinese Optical Society (China) [and] IOE--the Institute of Optics and Electronics, CAS (China) ; technical cosponsor, SPIE ; cosponsoring organizations, State Key Laboratory of Optical Technology for Microfabrication (China) [and] SOS--Sichuan Optical Society (China) ; cooperating organization, Committee of Optical Manufacturing Technology, COS (China) ; supporting organizations, Ministry of Science and Technology of China (China), Chinese Academy by
- Zhang, Yudong
- China. Guo jia ke xue ji shu bu, Guo jia zi ran ke xue ji jin wei yuan hui (China), International Symposium on Advanced Optical Manufacturing and Testing Technologies (4th : 2008 : Chengdu, China), Sichuan Optical Society, SPIE (Society), State Key Laboratory of Optical Technology for Microfabrication (China), Zhongguo guang xue xue hui, Zhongguo guang xue xue hui. Committee of Optical Manufacturing Technology, Zhongguo ke xue yuan, Zhongguo ke xue yuan. Institute of Optics and Electronics
Publication details: Bellingham, WA SPIE c2009
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.382750287 ZHA.
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Eighth international symposium on laser metrology : macro-, micro-, and nano-technologies applied in science, engineering, and industry : 14-18 February, 2005, Merida, Yucatan, Mexico R. Rodriguez-Vera, F. Mendoza-Santoyo, editors ; co-organized by, CIO--Centro de Investigaciones en Óptica, A.C. (Mexico), IMEKO TC-14--International Measurement Confederation, Technical Committee on Measurement of Geometrical Quantities ; sponsored by, SPIE--the International Society for Optical Engineering ... [et al.] ; published by SPIE--the International Society for Optical Engineering by
Publication details: Bellingham, WA SPIE c2005
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.366 VER.
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Fourth international conference on vibration measurements by laser techniques: advances and applications : 21-23 June, 2000, Ancona, Italy Enrico Primo Tomasini, chair/editor ; organized by A.I.VE.LA.--Italian Association of Laser Velocimetry, Dipartimento di meccanica, Università di Ancona ; supported by, European Commission, Research DG, Human Potential Programme, High-Level Scientific Conferences, HPCT-CT-1999-00079 ; participating organizations, ACI--American Concrete Institute International .. [et al.] ; published by SPIE--the International Society for Optical Engineering by
Publication details: Bellingham, WA SPIE, International Society for Optical Engineering c2000
Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.30287 TOM.
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Lidar remote sensing for industry and environment monitoring III : 24-25 October 2002, Hangzhou, China Upendra N. Singh, Tashikasu Itabe, Zhishen Liu, chairs/editors ; sponsors, CSO--Chinese Society of Oceanography (China), SPIE--the International Society for Optical Engineering ; cosponsors and supporting organizations, NASA Earth Science Technology Office (USA) ... [et al.] ; cooperating organizations, National Remote Sensing Center of China (China) ... [et al.] by
Publication details: Bellingham, WA SPIE c2003
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3678 SIN.
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Fourth international symposium on precision mechanical measurements : 25-29 August 2008, Hefei/Jiuhua Mountain, Anhui, China Yetai Fei, Kuang-Chao Fan, Rongsheng Lu, editors ; organized by Hefei University of Technology (China) ; coorganized by National Taiwan University (Taiwan, China), Seoul National University (Korea, Republic of), [and] the Hong Kong University of Science and Technology (China) ; sponsored by ICMI--International Committee on Measurements and Instrumentation, NSFC--National Natural Science Foundation of China (China), [and] CIS--China Instrument and Control Society (China) by
- Fan, Kuang-Chao
- Fei, Yetai
- Lu, Rongsheng
- Guo jia zi ran ke xue ji jin wei yuan hui (China), Guo li Taiwan da xue, Hefei gong ye da xue, Hong Kong University of Science and Technology, International Committee on Measurements and Instrumentation, International Symposium on Precision Mechanical Measurements (4th : 2008 : Hefei, China), Sŏul Taehakkyo, SPIE (Society), Zhongguo yi qi yi biao xue hui
Publication details: Bellingham, WA SPIE c2008
Availability: Items available for loan: Anna Centenary Library (2)Call number: 621 FEI, ...
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Metrology, inspection, and process control for microlithography XXIII : 23-26 February 2009, San Jose, California, United States John A. Allgair, Christopher J. Raymond, editors ; sponsored by SPIE ; cooperating organization, SEMATECH Inc. (United States) by
Publication details: Bellingham, WA SPIE 2009
Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381548 ALL, ...
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Optical test and measurement technology and equipment : 2nd international symposium on advanced Optical manufacturing and testing technologies : 2-5 November, 2005, Xian, China Xun Hou... [et al. ], chairs/editors ; sponsored by COS--Chinese Optical Society (China) [and] IOE--the Institute of Optics and Electronics, CAS (China) ; cooperating organizations, Committee of Optical Manufacturing Technology, COS (China)... [et al. ] ; supporting organization, National Natural Science Foundation (China) ; technical cosponsor & published by SPIE--the International Society for Optical Engineering by
Publication details: Bellingham, WA SPIE c2006
Availability: Items available for loan: Anna Centenary Library (2)Call number: 621. 36 HOU, ...
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