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	1.		Emerging lithographic technologies III : 15-17 march, 1999, Santa Clara, California Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International by Vladimirsky, Yuli Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 VLA.
	2.		Emerging lithographic technologies IX : 1-3 march 2005, San Jose, California, USA R. Scott Mackay, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH by Mackay, R. Scott International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2005 Availability: Items available for loan: Anna Centenary Library (2)Call number: 686.2315 MAC, ...
	3.		Emerging lithographic technologies VII : 25-27 February, 2003, Santa Clara, California, USA Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH by Engelstad, Roxann L International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2003 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 ENG, ...
	4.		Emerging lithographic technologies X : 21-23 February, 2006, San Jose, California, USA Michael J. Lercel, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc (USA) by Lercel, Michael J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2006 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 LER, ...
	5.		Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA) by Schellenberg, F. M International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 SCH, ...
	6.		EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado Carolyn A. MacDonald ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering by MacDonald, Carolyn Ann Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.36 MAC.
	7.		Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan Alek C. Chen ... [et al.] (Eds.) ; spons. and publ. by SPIE - The International Society for Optical Engineering by Chen, Alek C Society of Photo-optical Instrumentation Engineers (United States) Publication details: Bellingham, WA SPIE 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.3815 CHE.
	8.		Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States Frank M. Schellenberg, Bruno M. La Fontaine, editors, ; sponsored by SPIE ; cooperating organization, SEMATECH Inc by La Fontaine, Bruno M Schellenberg, F. M International SEMATECH, SPIE (Society) Publication details: Bellingham, Wash SPIE c2009- Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 SCH, ...
	9.		Emerging lithographic technologies VIII : 24-26 February, 2004, Santa Clara, California, USA R. Scott Mackay, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, [and] International SEMATECH by Mackay, R. Scott International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 2004 Availability: Items available for loan: Anna Centenary Library (1)Call number: 686.2315 MAC.
	10.		Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association by Chen, Alek C Lin, Burn Yen, Anthony SPIE (Society), Taiwan Semiconductor Industry Association Publication details: Bellingham, WA SPIE c2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 CHE, ...
	11.		Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States Daniel J.C. Herr, editor ; sponsored by SPIE; cooperating organization, SEMATECH Inc by Herr, Daniel J. C SEMATECH (Organization), SPIE (Society) Publication details: Bellingham, Wash SPIE c2010 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 HER.

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