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	1.		Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices Ungyu Paik, Jea-Gun Park by Paik, Ungyu Park, Jea-Gun Publication details: Boca Raton, FL CRC Press/Taylor & Francis Group 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 PAI.
	2.		Tribology in chemical-mechanical planarization Hong Liang, David Craven by Liang, Hong Craven, David R Publication details: Boca Raton, FL Taylor & Francis 2005 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.92 LIA.
	3.		Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses : fundamental mechanisms and application to IC interconnect technology by Christopher L. Borst, William N. Gill, Ronald J. Gutmann by Borst, Christopher L Gill, William N Gutmann, Ronald J Publication details: Deventer, The Netherlands ; Boston, MA Kluwer Academic Publishers 2002 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 BOR.

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