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	1.		Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering by Lakhani, Fred Tobin, Kenneth W Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 TOB.
	2.		Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30-31 July 2000, San Diego, USA Ghanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored... by SPIE--the International Society for Optical Engineering by Al-Jumaily, Ghanim A Duparré, Angela Singh, Bhanwar Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2000 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381045 AL.
	3.		Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, USA Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored... by SPIE--the International Society for Optical Engineering by Duparré, Angela Singh, Bhanwar Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381045 DUP.

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