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	1.		EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado Carolyn A. MacDonald ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering by MacDonald, Carolyn Ann Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.36 MAC.
	2.		Extreme ultraviolet (EUV) lithography : 22-25 February 2010, San Jose, California, United States Bruno M. La Fontaine, editor ; sponsored by SPIE ; cooperating organization SEMATECH Inc. (United States) by La Fontaine, Bruno M SEMATECH (Organization), SPIE (Society) Publication details: Bellingham, WA SPIE 2010 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.3815 FON, ...
	3.		Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States Frank M. Schellenberg, Bruno M. La Fontaine, editors, ; sponsored by SPIE ; cooperating organization, SEMATECH Inc by La Fontaine, Bruno M Schellenberg, F. M International SEMATECH, SPIE (Society) Publication details: Bellingham, Wash SPIE c2009- Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 SCH, ...
	4.		Advances in mirror technology for x-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors, ; sponsored and published by SPIE--the International Society for Optical Engineering by Dinger, Udo Khounsary, Ali M Ota, Kazuya Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2004 Availability: Items available for loan: Anna Centenary Library (1)Call number: 522.6863 KHO.
	5.		Advances in mirror technology for x-ray, EUV lithography, laser and other applications II : 5 August, 2004, Denver, Colorado, USA Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors, ; sponsored and published by SPIE--the International Society for Optical Engineering by Dinger, Udo Khounsary, Ali M Ota, Kazuya Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2004 Availability: Items available for loan: Anna Centenary Library (1)Call number: 681.428 KHQ.
	6.		Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States Daniel J.C. Herr, editor ; sponsored by SPIE; cooperating organization, SEMATECH Inc by Herr, Daniel J. C SEMATECH (Organization), SPIE (Society) Publication details: Bellingham, Wash SPIE c2010 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 HER.

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