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	1.		Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai by Matsui, Shinji Ochiai, Yukinori Suzuki, Katsumi Publication details: Cambridge Cambridge University Press 2000 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.395 SUZ.
	2.		Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai by Matsui, Shinji Ochiai, Yukinori Suzuki, Katsumi Publication details: Cambridge Cambridge University Press 2000 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.395 SUZ.
	3.		Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai by Matsui, Shinji Ochiai, Yukinori Suzuki, Katsumi Publication details: Cambridge Cambridge University Press 2000 Availability: No items available.
	4.		Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai by Matsui, Shinji Ochiai, Yukinori Suzuki, Katsumi Publication details: Cambridge Cambridge University Press 2000 Availability: No items available.

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