APA
edited by The society of chemical engineers of japan, . (1993). Introduction To Vlsi Process Engineering. [ s.l. ]: springer - Science + Business Media Dordrecht.
Chicago
edited by The society of chemical engineers of japan, . 1993. Introduction To Vlsi Process Engineering. [ s.l. ]: springer - Science + Business Media Dordrecht.
Harvard
edited by The society of chemical engineers of japan, . (1993). Introduction To Vlsi Process Engineering. [ s.l. ]: springer - Science + Business Media Dordrecht.
MLA
edited by The society of chemical engineers of japan, . Introduction To Vlsi Process Engineering. [ s.l. ]: springer - Science + Business Media Dordrecht. 1993.