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	1.		Optical microlithography XV : 5-8 march, 2002, Santa Clara, [California], USA Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH by Yen, Anthony International SEMATECH (Organization), Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2002 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 YEN, ...
	2.		Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association by Chen, Alek C Lin, Burn Yen, Anthony SPIE (Society), Taiwan Semiconductor Industry Association Publication details: Bellingham, WA SPIE c2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 CHE, ...

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