Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

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Publication details: Bellingham, WA SPIE 2003Description: ix, 604 p. : ill. ; 28 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 YAS (Browse shelf(Opens below))	Available		277417

Includes bibliographical references and author index

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