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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering
Publication details: Bellingham, Wash SPIE c2006Description: 1 v. (various pagings) : ill. ; 28 cmISBN:- 9780819461995
- 2006281963
- Integrated circuits - Defects - Analysis - Congresses
- Integrated circuits - Design and construction - Congresses
- Microelectronics industry - Quality control - Congresses
- Quality control - Congresses
- Semiconductor wafers - Defects - Analysis - Congresses
- Semiconductors - Design and construction - Congresses
- 621.382 WON
| Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|
| Anna Centenary Library | 621.382 WON (Browse shelf(Opens below)) | Available | 417644 |
Includes bibliographical references and author index
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