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	1.		Polymers for microelectronics : resists and dielectrics Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor by Tagawa, Seiichi Thompson, L. F Willson, C. G American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting (203rd : 1992 : San Francisco, Calif.) Publication details: Washington, DC American Chemical Society 1994 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 THO.
	2.		Introduction to microlithography edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden by Bowden, M. J Thompson, L. F Willson, C. G Edition: 2nd ed Publication details: Washington, DC American Chemical Society 1994 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381531 THO.

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