Nano- and micro-metrology : 16-17 June 2005, Munich, Germany Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society... [et al.] ; published by SPIE--the International Society for Optical Engineering

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Publication details: Bellingham, WA SPIE 2005Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	681.25 OTT (Browse shelf(Opens below))	Available		423798

Includes bibliographical references and author index

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