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Fundamental aspects of ultrathin dielectrics on Si-based devices edited by Eric Garfunkel, Evgeni Gusev, and Alexander Vul'

Contributor(s): Publication details: Dordrecht ; Boston Kluwer Academic Publishers c1998Description: x, 507 p. : ill. ; 25 cmISBN:
  • 9780792350071
ISSN:
  • 98004692
Subject(s): DDC classification:
  • 621.38152 GAR
Item type: Books
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Current library Call number Status Date due Barcode
Anna Centenary Library 621.38152 GAR (Browse shelf(Opens below)) Available 317606

Includes bibliographical references and index

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