Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China)

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Publication details: Bellingham, WA SPIE c2001Description: xi, 440 p. : ill. ; 30 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 TIE (Browse shelf(Opens below))	Available		423931

Includes bibliographical references and index

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