Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)

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Publication details: Bellingham, Wash SPIE c2008Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

9780819469717

ISSN:

2010483564

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DDC classification:

621.381 TAN

Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 TAN (Browse shelf(Opens below))	Available		417651

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics. Includes bibliographical references and index

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