Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices Ungyu Paik, Jea-Gun Park

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Publication details: Boca Raton, FL CRC Press/Taylor & Francis Group 2009Description: xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 PAI (Browse shelf(Opens below))	Available		145138

Includes bibliographical references (p. 171-175) and index

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