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	1.		Ultra clean processing of semiconductor surfaces ix Paul Mertens, Marc Meuris and Marc Heyns by Mertens, Paul Heyns, Marc Meuris, Marc Publication details: Switzerland Trans Tech 2009 Availability: Items available for loan: Anna Centenary Library (1)Call number: 537.622 MER.
	2.		Ultra clean processing of semiconductor surfaces viii: selected peer reviewed papers from the 8th international symposium on ultra clean processing of semiconductor surfaces(UCPSS) Edited by Paul Mertens; Marc Meuris; Marc Heyns by Mertens, Paul Publication details: Uetikon-Zuerich, Switzerland ; Enfield, NH Trans Tech Publications LTD 2006 Availability: Items available for loan: Anna Centenary Library (1)Call number: 537.622 MER.
	3.		Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998 editors, Marc Heybs, Marc Meuris and Paul Mertens by Heybs, Marc Mertens, Paul Meuris, Marc Publication details: Switzerland Scitec Publications 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HEY.
	4.		Ultra clean processing of silicon surfaces 2000 : proceedings of the fifth international symposium on ultra clean processing of silicon surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000 edited by Marc Heyns, Paul Mertens and Marc Meuris by Heyns, Marc Mertens, Paul Meuris, Marc Publication details: Switzerland Scitec/Trans Tech Publications 2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 620.193 HEY.
	5.		Ultra clean processing of silicon surfaces V edited by Marc Heyns,Paul Mertens and Marc Meuris by Heyns, Marc Mertens, Paul Meuris, Marc Publication details: Switzerland Scitec Publications 2003 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HEY.
	6.		Ultra clean processing of silicon surfaces VII : UCPSS 2004 : proceedings of the 7th international symposium on ultra clean processing of silicon surfaces (UCPSS) held in Brussels, Belgium, September 20-22, 2004 edited by Marc Heyns, Marc Meuris, and Paul Mertens by Heyns, Marc Mertens, Paul Meuris, Marc International Symposium on Ultra Clean Processing of Silicon Surfaces (7th : 2004 : Brussels, Belgium) Publication details: Uetikon-Zuerich, Switzerland ; Enfield, NH Trans Tech Publications c2005 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 MER.

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