Fundamentals of microfabrication : the science of miniaturization Marc J. Madou

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Publication details: Boca Raton, FL CRC Press 2002Edition: 2nd edDescription: 723 p. : col. ill. ; 29 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 MAD (Browse shelf(Opens below))	Available		289412

Includes bibliographical references and index

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