Materials and processes for submicron technologies : proceedings of symposium N on materials and processes for Submicron technologies of the E-MRS spring conference, Strasbourg, France, 16-19 June 1998 edited by J.M. Martinez-Duart, R. Madar, R.A. Levy

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Publication details: Amsterdam Elsevier 1999Description: 1002-1175 p. : ill. ; 29 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 MAR (Browse shelf(Opens below))	Available		331106

Repr. from Solid state electronics, v.43/6. Includes bibliographical references

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