Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

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Publication details: Bellingham, WA SPIE c2001Description: vii, 156 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 TOB (Browse shelf(Opens below))	Available		423975

Includes bibliographical references and index

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