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Gettering and defect engineering in semiconductor technology: Gadest '95 : held in Parkhotel Schloss Wulkow, near Berlin, Germany, September 02-07, 1995 edited by M Kittler, H Richter and Cor L Claeys by
Publication details: Uetikon-Zuerich, Switzerland Scitec Publications 1995
Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 KIT.

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