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23rd Annual Bacus Symposium On Photomask Technology : 9-12 September, 2003, Monterey, California, Usa / edited by Kurt R. Kimmel, Wolfgang Staud by Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5256
Edition: 1st ed.
Publication details: Bellingham Spie C2003
Availability: Items available for reference: Anna Centenary Library: Not for loan (1).

2.
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23rd Annual Bacus Symposium On Photomask Technology : 9-12 September, 2003, Monterey, California, Usa / edited by Kurt R. Kimmel, Wolfgang Staud by Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5256
Edition: 1st ed.
Language: English
Publication details: Bellingham Spie c2003
Availability: Items available for reference: Anna Centenary Library: Not for loan (1)Call number: 621.381531 KIM.

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