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	1.		Metrology, inspection, and process control for microlithography XXII : 25-28 February 2008, San Jose, California, USA John A. Allgair, Christopher J. Raymond, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) by Allgair, John A Raymond, Christopher J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 539.752 ALL, ...
	2.		Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA Iraj Emami, chair/editor ; Christopher P. Ausschnitt, Kenneth W. Tobin, Jr., cochair/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH ; published by SPIE--the International Society for Optical Engineering by Ausschnitt, Christopher P Emami, Iraj Tobin, Kenneth W International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2005 Availability: Items available for loan: Anna Centenary Library (1)Call number: 629.895 EMA.
	3.		Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH by Liebmann, Lars W International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2005 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 LIE.
	4.		Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering by Singh, Vivek K Wong, Alfred Kwok-Kit International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2006 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.382 WON.
	5.		Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA) by Rieger, Michael L Singh, Vivek K International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE c2008 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.382 SIN.
	6.		Emerging lithographic technologies IX : 1-3 march 2005, San Jose, California, USA R. Scott Mackay, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH by Mackay, R. Scott International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2005 Availability: Items available for loan: Anna Centenary Library (2)Call number: 686.2315 MAC, ...
	7.		Emerging lithographic technologies X : 21-23 February, 2006, San Jose, California, USA Michael J. Lercel, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc (USA) by Lercel, Michael J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2006 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 LER, ...
	8.		Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA) by Schellenberg, F. M International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.381531 SCH, ...
	9.		Advances in resist materials and processing technology XXV : 25-27 February 2008, San Jose, California, USA Clifford L. Henderson, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA) by Henderson, Clifford L International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, Wash SPIE 2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621.31 HEN, ...
	10.		Metrology, inspection, and process control for microlithography XXI : 26 February- 1 march 2007, San Jose, California, USA Chas N. Archie, editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH (USA) by Archie, Chas N International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2007 Availability: Items available for loan: Anna Centenary Library (3)Call number: 621.395 ARC, ...
	11.		Optical microlithography XVIII : 1-4 march, 2005, San Jose, California, USA Bruce W. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH by Smith, Bruce W International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2005 Availability: Items available for loan: Anna Centenary Library (3)Call number: 621. 381531 SMI, ...
	12.		Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) by Dusa, Mircea V Levinson, Harry J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 2008 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621. 381531 LEV.
	13.		Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) by Dusa, Mircea V Levinson, Harry J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2008 Availability: Items available for loan: Anna Centenary Library (2)Call number: 621. 381531 LEV, ...
	14.		Optical microlithography XVIII : 1-4 march, 2005, San Jose, California, USA Bruce W. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH by Smith, Bruce W International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2005 Availability: No items available.
	15.		Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) by Dusa, Mircea V Levinson, Harry J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE 2008 Availability: No items available.
	16.		Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) by Dusa, Mircea V Levinson, Harry J International SEMATECH, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2008 Availability: No items available.

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