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	1.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HIT.
	2.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.38152 HIT.
	3.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: No items available.
	4.		Plasma processes for semiconductor fabrication W.N.G. Hitchon by Hitchon, W. Nicholas G Publication details: Cambridge Cambridge University Press 1999 Availability: No items available.

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