Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998 editors, Marc Heybs, Marc Meuris and Paul Mertens

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Publication details: Switzerland Scitec Publications 1999Description: xiv, 301 p. : ill. ; 25 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 HEY (Browse shelf(Opens below))	Available		387684

Includes index

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