Handbook of VLSI microlithography : principles, technology, and applications [edited] by John N. Helbert

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Publication details: Park Ridge, NJ Noyes Publications/William Andrew Pub 2001Edition: 2nd edDescription: xxi, 1001 p. : ill. ; 24 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381531 HEL (Browse shelf(Opens below))	Available		340286

Includes bibliographical references and index

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