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	1.		MEMS design, fabrication, characterization, and packaging : 30 may-1 June 2001, Edinburgh, UK Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK) by Behringer, Uwe F. W Uttamchandani, Deepak European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 BEH.
	2.		Process and equipment control in microelectronic manufacturing II : 30-31 may 2001, Edinburgh, UK Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK) by Fallon, Martin European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 FAL.
	3.		In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK Gudrun Kissinger, Larg H. Weiland, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK) by Kissinger, Gudrun Weiland, Larg H European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 621.381 KIS.
	4.		Lithography for semiconductor manufacturing II : 30 may-1 June, 2001, Edinburgh, UK Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK) by Mack, Chris A Stevenson, Tom European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers Publication details: Bellingham, WA SPIE c2001 Availability: Items available for loan: Anna Centenary Library (1)Call number: 670 MAC.

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