Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)

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Publication details: Bellingham, WA SPIE c2000Description: ix, 200 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 VLA (Browse shelf(Opens below))	Available		277376

Includes bibliographical references and index

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