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Nanolithography and patterning techniques in microelectronics edited by David G. Bucknall

Contributor(s): Publication details: Cambridge ; Boca Raton, FL CRC Press, Woodhead Pub 2005Description: xiv, 409 p. : ill. ; 24 cmISBN:
  • 9780849334474
ISSN:
  • 2006365086
Subject(s): DDC classification:
  • 621.381531 BUC
Item type: Books
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Current library Call number Status Date due Barcode
Anna Centenary Library 621.381531 BUC (Browse shelf(Opens below)) Available 351649

Includes bibliographical references and index

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