Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses : fundamental mechanisms and application to IC interconnect technology by Christopher L. Borst, William N. Gill, Ronald J. Gutmann

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 BOR (Browse shelf(Opens below))	Available		304305

Includes bibliographical references and index

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