CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications D. Lange, O. Brand, H. Baltes

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Publication details: Berlin Springer c2002Description: viii, 142 p. : ill. ; 25 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	681.413 LAN (Browse shelf(Opens below))	Available		300177

Includes bibliographical references (p. [131]-140) and index

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