EMLC 2005 : 21st European mask and lithography conference : 31 January-3 February, 2005, Dresden, Germany Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)

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Publication details: Bellingham, Wash., ; Berlin, Germany SPIE ; VDE Verlag GmbH c2005Description: xxx, 302 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38173 BEH (Browse shelf(Opens below))	Available		277015

Includes bibliographical references and author index

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