/cgi-bin/koha/opac-search.pl?q=ccl=au%3A%22S.M.Sze%2C%22&sort_by=relevance&format=rss 2 0 50 ISBN:9780070582910 /cgi-bin/koha/opac-detail.pl?biblionumber=90077 By Sze, S. M.
New Delhi Tata McGraw Hill Education 2010 .
xii, 676 p. : 23 cm , Contents : Chapter 1 Crystal Growth and water prepreparation Chapter 1 Crystal Growth and water prepreparation Chapter 2 Epitaxy Chapter 3 Oxidation Chapter 4 Lithography Chapter 5 Reactive Plasma Etching Chapter 6 Dielectric and Polysilicon Film Deposition Chapter 7 Diffusion Chapter 9 Metallization Chapter 10 Process Simulation Chapter 11 VLSI Process Integration Chapter 12 Analytical Techniques Chapter 13 Assembly techniques and Pavckaging of VLSI Devices Chapter 14 Yield and Reliability Appendixes Index &nbsp; </li> 9780070582910

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]]> /cgi-bin/koha/opac-detail.pl?biblionumber=90077 ISBN:9788126516810 /cgi-bin/koha/opac-detail.pl?biblionumber=598313 By S.M.Sze,.
John Wiley & Sons, 2008 .
576 pages 9788126516810

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