TY  - BOOK
AU  - Fukuda, T
AU  - Menz, W
TI  - Micro mechanical systems : principles and technology
SN  - 9780444823632
SN  - 98020529
U1  - 621 FUK 
PY  - 1998///
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectromechanical systems - Handbooks, manuals, etc
N1  - Includes bibliographical references
ER  -