Micro mechanical systems : principles and technology 
edited by T. Fukuda and W. Menz 
 - Amsterdam  Elsevier  1998 
 - viii, 268 p. : ill. ; 25 cm 
<br/><br/> Includes bibliographical references 
<br/><br/><label>ISBN: </label>9780444823632 
<br/><br/><label>ISSN: </label>98020529 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Handbooks, manuals, etc
<br/><br/><label>Dewey Class. No.: </label>621 FUK