TY  - BOOK
AU  - Chiao, Jung-Chih
ED  - Defence Science and Technology Organisation (Australia), Society of Photo-optical Instrumentation Engineers
TI  - Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia
SN  - 9780819465238
SN  - 200727836
U1  - 620.5 CHI 
PY  - 2007///
CY  - Bellingham, WA
PB  - SPIE
KW  - Electronic packaging - Congresses
KW  - Microelectromechanical systems - Congresses
KW  - Nanotechnology - Materials - Congresses
N1  - Includes bibliographical references and index
ER  -