Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia 
Jung-Chih Chiao ... [et al.], chair/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Australian Government Department of Defence, Defence Science and Technology Organisation (Australia) ... [et al.] 
 - Bellingham, WA  SPIE  2007 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819465238 
<br/><br/><label>ISSN: </label>2007278360 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic packaging - Congresses<br/>Microelectromechanical systems - Congresses<br/>Nanotechnology - Materials - Congresses
<br/><br/><label>Dewey Class. No.: </label>620.5 CHI