TY  - BOOK
AU  - Orlikovskiĭ, A. A
AU  - Valiev, Kamilʹ Akhmetovich
ED  - Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk), ICMNE-2003 (2003 : Zvenigorod, Russia), Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ, Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Russian Chapter
TI  - Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia
SN  - 9780819453242
SN  - 200527829
U1  - 621.381 VAL 
PY  - 2004///
CY  - Bellingham, WA
PB  - SPIE
KW  - Lithography - Congresses
KW  - Microelectronics - Congresses
KW  - Nanotechnology - Congresses
KW  - Photonics - Materials - Congresses
N1  - Includes bibliographical references and index
ER  -