TY  - BOOK
AU  - Lakhani, Fred
AU  - Tobin, Kenneth W
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA
SN  - 9780819439536
SN  - 200127571
U1  - 621.381 TOB 
PY  - 2001///
CY  - Bellingham, WA
PB  - SPIE
KW  - Lasers - Industrial applications - Congresses
KW  - Metrology - Congresses
KW  - Microelectronics industry - Quality control - Congresses
KW  - Optoelectronic devices - Industrial applications - Congresses
KW  - Surfaces (Technology) - Measurement - Congresses
N1  - Includes bibliographical references and index
ER  -