Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA 
Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  c2001 
 - vii, 156 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819439536 
<br/><br/><label>ISSN: </label>2001275710 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Lasers - Industrial applications - Congresses<br/>Metrology - Congresses<br/>Microelectronics industry - Quality control - Congresses<br/>Optoelectronic devices - Industrial applications - Congresses<br/>Surfaces (Technology) - Measurement - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 TOB